The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 02, 2024

Filed:

Dec. 15, 2020
Applicants:

Taiwan Semiconductor Manufacturing Company, Ltd., Hsinchu, TW;

Tsmc China Company, Limited, Shanghai, CN;

Inventors:

Jian Wu, Hsinchu, TW;

Feng Han, Hsinchu, TW;

Shuai Zhang, Hsinchu, TW;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 23/00 (2006.01); H01L 23/36 (2006.01); H01L 21/48 (2006.01); H01L 27/12 (2006.01);
U.S. Cl.
CPC ...
H01L 23/36 (2013.01); H01L 21/4871 (2013.01); H01L 21/4875 (2013.01); H01L 27/1203 (2013.01);
Abstract

An integrated circuit includes an oxide layer over a substrate; a layer of semiconductor material over the oxide layer and which includes a P-well, an N-well, and a channel of a transistor; and a thermal substrate contact extending through the layer of semiconductor material and the oxide layer, and against a top surface of the substrate. A thermal substrate contact increases the ability to remove heat produced from the integrated circuit transistors out of the integrated circuit. A thermal substrate contact which traverses the oxide layer over a substrate provides a secondary path for heat out of an integrated circuit (or, alternatively, out of a substrate through the integrated circuit) to cool the integrated circuit.


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