The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 26, 2023

Filed:

Aug. 09, 2021
Applicant:

Taiwan Semiconductor Manufacturing Company Ltd., Hsinchu, TW;

Inventors:

Yang-Che Chen, Hsin-Chu, TW;

Wei-Yu Chou, Taichung, TW;

Hong-Seng Shue, Hsinchu County, TW;

Chen-Hua Lin, Yunlin County, TW;

Huang-Wen Tseng, Hsinchu County, TW;

Victor Chiang Liang, Hsinchu, TW;

Chwen-Ming Liu, Hsinchu, TW;

Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/66 (2006.01); H01L 23/58 (2006.01); H01L 21/56 (2006.01); H01L 23/00 (2006.01); H01L 21/78 (2006.01); G01R 31/26 (2020.01); H01L 21/82 (2006.01);
U.S. Cl.
CPC ...
H01L 22/32 (2013.01); G01R 31/2644 (2013.01); H01L 21/565 (2013.01); H01L 21/78 (2013.01); H01L 21/82 (2013.01); H01L 22/12 (2013.01); H01L 23/562 (2013.01); H01L 23/564 (2013.01); H01L 23/585 (2013.01); H01L 24/13 (2013.01); H01L 2224/13024 (2013.01);
Abstract

A method for detecting defects in a semiconductor device including singulating a die having a substrate including a circuit region and an outer border, a plurality of detecting devices disposed over the substrate and located between the circuit region and the outer border, a first probe pad and a second probe pad electrically connected to two ends of each detecting device, and a seal ring located between the outer border of the die and the detecting devices. The method further includes probing the first probe pad and the second probe pad to determine a connection status of the detecting device, and recognizing a defect when the connection status of the detecting device indicates an open circuit.


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