The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 28, 2023
Filed:
Nov. 15, 2022
Applicant:
Zju—hangzhou Global Scientific and Technological Innovation Center, Hangzhou, CN;
Inventors:
Rong Wang, Hangzhou, CN;
Wenhao Geng, Hangzhou, CN;
Xiaodong Pi, Hangzhou, CN;
Deren Yang, Hangzhou, CN;
Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C25F 3/12 (2006.01); C30B 33/10 (2006.01); C30B 29/36 (2006.01);
U.S. Cl.
CPC ...
C25F 3/12 (2013.01); C30B 29/36 (2013.01); C30B 33/10 (2013.01);
Abstract
The present disclosure relates to the field of manufacturing of silicon carbide (SiC) single crystal wafers, and discloses a stripping method and a stripping device for SiC single crystal wafers. The single crystal wafers obtained by the present disclosure have no damage layer or stress residue on surfaces or sub-surfaces, and are simple in operation and low in cost.