The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 21, 2023
Filed:
Apr. 13, 2022
Applicant:
Taiwan Semiconductor Manufacturing Company, Ltd., Hsinchu, TW;
Inventors:
Assignee:
Taiwan Semiconductor Manufacturing Company, Ltd., Hsinchu, TW;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/68 (2006.01); H01L 21/66 (2006.01); H01L 21/56 (2006.01); H01L 21/687 (2006.01);
U.S. Cl.
CPC ...
H01L 21/68 (2013.01); H01L 21/565 (2013.01); H01L 21/68728 (2013.01); H01L 22/12 (2013.01); H01L 22/26 (2013.01); H01L 22/30 (2013.01);
Abstract
An alignment holder for holding a composite specimen includes a holder body and a positioning mechanism. The holder body is configured to clamp a first side of the composite specimen therein. The positioning mechanism is movably engaged with the holder body. The positioning mechanism is configured to lean against a second side of the composite specimen and move relatively to the holder body for adjusting a clamping position of the composite specimen clamped by the holder body.