The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 17, 2023
Filed:
Sep. 03, 2020
Taiwan Semiconductor Manufacturing Company, Ltd., Hsinchu, TW;
Cheng-Shiuan Wong, Hsinchu, TW;
Chih-Chiang Tsao, Taoyuan, TW;
Chao-Wei Chiu, Hsinchu, TW;
Hao-Jan Pei, Hsinchu, TW;
Wei-Yu Chen, Taipei, TW;
Hsiu-Jen Lin, Hsinchu County, TW;
Ching-Hua Hsieh, Hsinchu, TW;
Chia-Shen Cheng, Hsinchu County, TW;
Taiwan Semiconductor Manufacturing Company, Ltd., Hsinchu, TW;
Abstract
A workpiece holder includes a chuck body and a seal ring. The chuck body includes a receiving surface configured to receive a workpiece and at least one vacuum port configured to apply a vacuum seal. The seal ring surrounds a side surface of the chuck body. A top surface of the seal ring is higher than the receiving surface of the chuck body, and the workpiece leans against the seal ring when the vacuum seal is applied between the workpiece and the chuck body.