The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 03, 2023

Filed:

Feb. 22, 2018
Applicant:

Intel Corporation, Santa Clara, CA (US);

Inventors:

Aaron Lilak, Beaverton, OR (US);

Anh Phan, Beaverton, OR (US);

Gilbert Dewey, Beaverton, OR (US);

Willy Rachmady, Beaverton, OR (US);

Patrick Morrow, Portland, OR (US);

Assignee:

Intel Corporation, Santa Clara, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 23/522 (2006.01); H01L 23/528 (2006.01); H01L 27/088 (2006.01); H01L 29/06 (2006.01); H01L 29/78 (2006.01); H01L 23/532 (2006.01); H01L 27/06 (2006.01); H01L 21/8234 (2006.01); H01L 29/66 (2006.01); H01L 21/768 (2006.01); H01L 21/822 (2006.01);
U.S. Cl.
CPC ...
H01L 23/5226 (2013.01); H01L 21/76832 (2013.01); H01L 21/76897 (2013.01); H01L 21/823431 (2013.01); H01L 21/823475 (2013.01); H01L 23/5283 (2013.01); H01L 23/53295 (2013.01); H01L 27/0886 (2013.01); H01L 29/0638 (2013.01); H01L 29/66795 (2013.01); H01L 29/785 (2013.01); H01L 21/8221 (2013.01); H01L 27/0688 (2013.01);
Abstract

Interconnect metallization of an integrated circuit device includes a sidewall contact between conductive features. In a stacked device, a terminal interconnect of one device layer may intersect a sidewall of a conductive feature in another device layer or between two devices layers. In some examples, a terminal interconnect coupled to a gate, source, or drain terminal of a finFET in a vertically-stacked device may extend to a depth below a plane of the fin and intersect a sidewall of another interconnect, or another device terminal, that is in another plane of the stacked device. A stop layer below a top surface of the conductive feature may allow for sidewall contact while avoiding interconnect shorts.


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