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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 11776840 B1

PDFFull Text
Date of Patent:
Oct. 03, 2023

Filed:

Oct. 29, 2019

Superstrate chuck, method of use, and method of manufacturing an article

Applicant:

Canon Kabushiki Kaisha, Tokyo, JP;

Inventors:

Nilabh K. Roy, Austin, TX (US);

Mario Johannes Meissl, Austin, TX (US);

Seth J. Bamesberger, Austin, TX (US);

Ozkan Ozturk, Round Rock, TX (US);

Byung-Jin Choi, Austin, TX (US);

Assignee:

Canon Kabushiki Kaisha, Tokyo, JP;

Attorney:

Canon U.S.A., Inc., IP Division

Primary Examiner:

Leith S Shafi

Assistant Examiner:

Inja Song

Int. Cl.
CPC ...
H01L 21/687 (2006.01); B29C 33/00 (2006.01); B29C 35/08 (2006.01);
U.S. Cl.
CPC ...
H01L 21/68785 (2013.01); B29C 33/00 (2013.01); B29C 35/0805 (2013.01); B29C 2033/0005 (2013.01); B29C 2035/0827 (2013.01); B29K 2995/0026 (2013.01);
Abstract

A chuck for retaining a superstrate or a template. The chuck comprises a geometric structure formed on a surface of the chuck. The geometric structure includes at least one of a rounded edge portion and a roughened surface portion, such that an intensity variation of light transmitting through the geometric structure and an area of the chuck adjacent to the geometric structure is reduced.

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Roy, Nilabh. (2023). Superstrate chuck, method of use, and method of manufacturing an article (U.S. Patent No. 11776840). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/11776840

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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