The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 03, 2023
Filed:
Sep. 29, 2020
Applied Materials, Inc., Santa Clara, CA (US);
Zheng John Ye, Santa Clara, CA (US);
Daemian Raj Benjamin Raj, Fremont, CA (US);
Rana Howlader, Santa Clara, CA (US);
Abhigyan Keshri, Sunnyvale, CA (US);
Sanjay G. Kamath, Fremont, CA (US);
Dmitry A. Dzilno, Sunnyvale, CA (US);
Juan Carlos Rocha-Alvarez, San Carlos, CA (US);
Shailendra Srivastava, Fremont, CA (US);
Kristopher R. Enslow, San Jose, CA (US);
Xinhai Han, Santa Clara, CA (US);
Deenesh Padhi, Sunnyvale, CA (US);
Edward P. Hammond, Hillsborough, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
Exemplary semiconductor processing systems may include a processing chamber and an electrostatic chuck disposed at least partially within the processing chamber. The electrostatic chuck may include at least one electrode and a heater. A semiconductor processing system may include a power supply to provide a signal to the electrode to provide electrostatic force to secure a substrate to the electrostatic chuck. The system may also include a filter communicatively coupled between the power supply and the electrode. The filter is configured to remove or reduce noise introduced into the chucking signal by operating the heater while the electrostatic force on the substrate is maintained. The filter may include active circuitry, passive circuitry, or both, and may include an adjustment circuit to set the gain of the filter so that an output signal level from the filter corresponds to an input signal level for the filter.