The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 03, 2023
Filed:
May. 22, 2020
Applicant:
Kla Corporation, Milpitas, CA (US);
Inventors:
Jan Lauber, San Francisco, CA (US);
Jason Kirkwood, Mountain View, CA (US);
Assignee:
KLA Corporation, Milpitas, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 21/95 (2006.01); G06T 7/00 (2017.01); G06T 11/60 (2006.01); G06T 5/50 (2006.01);
U.S. Cl.
CPC ...
G01N 21/9501 (2013.01); G06T 5/50 (2013.01); G06T 7/0004 (2013.01); G06T 11/60 (2013.01); G06T 2207/20084 (2013.01); G06T 2207/30148 (2013.01);
Abstract
A system has detectors configured to receive a beam of light reflected from a wafer. For example, three detectors may be used. Each of the detectors is a different channel. Images from the detectors are combined into a pseudo-color RGB image. A convolutional neural network unit (CNN) can receive the pseudo-color RGB image and determine a size of a defect in the pseudo-color RGB image. The CNN also can classify the defect into a size category.