The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 03, 2023
Filed:
Feb. 21, 2022
Carl Zeiss Smt Gmbh, Oberkochen, DE;
CARL ZEISS SMT GMBH, Oberkochen, DE;
Abstract
A method for calibrating a measuring device () for interferometrically determining a shape of an optical surface () of an object under test (). The measuring device includes a module plane () for arranging a diffractive optical test module () which is configured to generate a test wave () that is directed at the optical surface and that has a wavefront at least approximately adapted to a target shape () of the optical surface. The method includes: arranging a diffractive optical calibration module () in the module plane for generating a calibration wave (), acquiring a calibration interferogram () generated using the calibration wave in a detector plane () of the measuring device, and determining a position assignment distribution () of points () in the module plane to corresponding points () in the detector plane from the acquired calibration interferogram.