The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 26, 2023
Filed:
Jun. 21, 2018
Applicant:
Intel Corporation, Santa Clara, CA (US);
Inventors:
Daniel J. Zierath, Portland, OR (US);
Michael McSwiney, Scappoose, OR (US);
Jason Farmer, Hillsboro, OR (US);
Akm Shaestagir Chowdhury, Portland, OR (US);
Assignee:
Intel Corporation, Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 23/532 (2006.01); H01L 21/285 (2006.01); H01L 21/768 (2006.01); H01L 23/522 (2006.01); H01L 25/065 (2023.01); C22C 19/07 (2006.01); C23C 16/02 (2006.01); C22C 30/00 (2006.01); C23C 16/06 (2006.01); C22C 19/03 (2006.01); C23C 16/04 (2006.01); C22C 19/00 (2006.01);
U.S. Cl.
CPC ...
H01L 23/53209 (2013.01); C22C 19/00 (2013.01); C22C 19/03 (2013.01); C22C 19/07 (2013.01); C22C 30/00 (2013.01); C23C 16/0281 (2013.01); C23C 16/045 (2013.01); C23C 16/06 (2013.01); H01L 21/28556 (2013.01); H01L 21/76846 (2013.01); H01L 21/76847 (2013.01); H01L 21/76849 (2013.01); H01L 21/76876 (2013.01); H01L 23/5226 (2013.01); H01L 23/53223 (2013.01); H01L 23/53266 (2013.01); H01L 25/0652 (2013.01);
Abstract
Provided herein are metal structures that may include a cobalt alloy, a nickel alloy, or nickel, as well as related devices and methods. The metal structures may be formed by chemical vapor deposition (CVD), and may include trace amounts of precursor materials used during the CVD process.