The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 19, 2023
Filed:
Nov. 20, 2020
Applicant:
Tokyo Electron Limited, Tokyo, JP;
Inventors:
Tatsuo Hatano, Yamanashi, JP;
Tetsuya Miyashita, Yamanashi, JP;
Naoki Watanabe, Yamanashi, JP;
Naoyuki Suzuki, Yamanashi, JP;
Assignee:
TOKYO ELECTRON LIMITED, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/677 (2006.01); B25J 9/02 (2006.01); B25J 9/12 (2006.01); B25J 11/00 (2006.01); H02K 7/14 (2006.01); H02K 41/02 (2006.01); H01L 21/67 (2006.01); H01L 21/687 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67742 (2013.01); B25J 9/02 (2013.01); B25J 9/12 (2013.01); B25J 11/0095 (2013.01); H02K 7/14 (2013.01); H02K 41/02 (2013.01); H01L 21/67167 (2013.01); H01L 21/67748 (2013.01); H01L 21/68707 (2013.01);
Abstract
The substrate transfer apparatus includes a planar motor provided in a transfer chamber and having coils arranged therein; a transfer unit movable on the planar motor; and a control unit configured to control an energization of the coils. The transfer unit includes two bases having magnets arranged thereon and configured to be movable on the planar motor, a substrate support member configured to support a substrate, and a link mechanism configured to connect the two bases and the substrate support member to each other.