The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 19, 2023
Filed:
Jun. 01, 2021
Applied Materials, Inc., Santa Clara, CA (US);
Jimin Zhang, San Jose, CA (US);
Brian J. Brown, Palo Alto, CA (US);
Eric Lau, Santa Clara, CA (US);
Ekaterina Mikhaylichenko, San Jose, CA (US);
Jeonghoon Oh, Saratoga, CA (US);
Gerald J. Alonzo, Los Gatos, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
Certain aspects of the present disclosure provide techniques for a method of removing material on a substrate. An exemplary method includes rotating a substrate about a first axis in a first direction and urging a surface of the substrate against a polishing surface of a polishing pad while rotating the substrate, wherein rotating the substrate about the first axis includes rotating the substrate a first angle at a first rotation rate, and then rotating the substrate a second angle at a second rotation rate, and the first rotation rate is different from the second rotation rate.