The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 12, 2023
Filed:
Mar. 14, 2022
Applied Materials Israel Ltd., Rehovot, IL;
Vadim Vereschagin, Hod-HaSharon, IL;
Roman Kris, Jerusalem, IL;
Ishai Schwarzband, Or-Yehuda, IL;
Boaz Cohen, Lehavim, IL;
Evgeny Bal, Natanya, IL;
Ariel Shkalim, Even-Shmuel, IL;
Applied Materials Israel Ltd., Rehovot, IL;
Abstract
Input data may be received. The input data may include an image of a pattern and location data that identifies a modified portion of the pattern. A processing device may determine a first parameter of a first dimension within the pattern and a second parameter of a second dimension outside of the pattern. A combined set may be generated based on the first parameter and the second parameter. A defect associated with the modified portion may be classified based on the combined set.