The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 12, 2023
Filed:
Jul. 01, 2022
Applicant:
Asml Netherlands B.v., Veldhoven, NL;
Inventors:
Raymond Wilhelmus Louis Lafarre, Helmond, NL;
Sjoerd Nicolaas Lambertus Donders, Vught, NL;
Nicolaas Ten Kate, Almkerk, NL;
Nina Vladimirovna Dziomkina, Eindhoven, NL;
Yogesh Pramod Karade, Eindhoven, NL;
Elisabeth Corinne Rodenburg, Heeze, NL;
Assignee:
ASML NETHERLANDS B.V., Veldhoven, NL;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/20 (2006.01); G03F 7/00 (2006.01); B23K 26/354 (2014.01); B23K 26/342 (2014.01); B22F 10/00 (2021.01); B22F 10/20 (2021.01); B23Q 3/18 (2006.01); B05D 3/06 (2006.01); B05D 5/00 (2006.01); B33Y 10/00 (2015.01); B33Y 80/00 (2015.01); B22F 7/06 (2006.01); B22F 10/25 (2021.01); B22F 10/28 (2021.01); B22F 10/66 (2021.01);
U.S. Cl.
CPC ...
G03F 7/70341 (2013.01); B05D 3/06 (2013.01); B05D 5/00 (2013.01); B22F 7/062 (2013.01); B22F 10/00 (2021.01); B22F 10/20 (2021.01); B23K 26/342 (2015.10); B23K 26/354 (2015.10); B23Q 3/18 (2013.01); B33Y 10/00 (2014.12); B33Y 80/00 (2014.12); G03F 7/20 (2013.01); G03F 7/707 (2013.01); G03F 7/708 (2013.01); G03F 7/70416 (2013.01); G03F 7/70708 (2013.01); G03F 7/70716 (2013.01); G03F 7/70733 (2013.01); B22F 10/25 (2021.01); B22F 10/28 (2021.01); B22F 10/66 (2021.01);
Abstract
A substrate holder for use in a lithographic apparatus, the substrate holder including: a main body; a plurality of first burls provided on a first side of the main body and having end surfaces to support a substrate, wherein the first burls each include CrN; and a plurality of second burls provided on a second side of the main body.