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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 11736037 B1

PDFFull Text
Date of Patent:
Aug. 22, 2023

Filed:

Oct. 30, 2019

Mems structure and method of forming same

Applicant:

Taiwan Semiconductor Manufacturing Company, Ltd., Hsinchu, TW;

Inventors:

Yi Heng Tsai, Hsinchu, TW;

Chia-Hua Chu, Zhubei, TW;

Kuei-Sung Chang, Kaohsiung, TW;

Assignee:

TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., Hsin-Chu, TW;

Attorney:

Slater Matsil, LLP

Primary Examiner:

Jill E Culler

Assistant Examiner:

Ruben C Parco, Jr

Int. Cl.
CPC ...
G01P 15/125 (2006.01); G01P 15/00 (2006.01); H02N 1/00 (2006.01); B81B 3/00 (2006.01); G01P 15/08 (2006.01);
U.S. Cl.
CPC ...
H02N 1/006 (2013.01); B81B 3/001 (2013.01); B81B 3/0005 (2013.01); B81B 3/0008 (2013.01); G01P 15/125 (2013.01); H02N 1/00 (2013.01); B81B 2201/0235 (2013.01); G01P 2015/0871 (2013.01); Y10T 29/49002 (2015.01);
Abstract

A microelectromechanical system (MEMS) device includes a substrate and a movable element at least partially suspended above the substrate and having at least one degree of freedom. The MEMS device further includes a protrusion extending from the substrate and configured to contact the movable element when the movable element moves in the at least one degree of freedom, wherein the protrusion comprises a surface having a water contact angle of higher than about 15° measured in air.

Find Patent Forward Citations

Tsai, Yi. (2023). Mems structure and method of forming same (U.S. Patent No. 11736037). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/11736037

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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