The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 22, 2023
Filed:
Dec. 20, 2018
Applicant:
Ebara Corporation, Tokyo, JP;
Inventors:
Kuniaki Yamaguchi, Tokyo, JP;
Itsuki Kobata, Tokyo, JP;
Toshio Mizuno, Tokyo, JP;
Mitsuru Miyazaki, Tokyo, JP;
Naoki Toyomura, Tokyo, JP;
Takuya Inoue, Tokyo, JP;
Assignee:
EBARA CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01); B24B 53/017 (2012.01); B08B 3/02 (2006.01); B08B 1/04 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
B24B 53/017 (2013.01); B08B 1/04 (2013.01); B08B 3/02 (2013.01); H01L 21/67046 (2013.01); H01L 21/67051 (2013.01); B08B 2203/0288 (2013.01);
Abstract
An embodiment of the present invention provides a buff process module. The buff process module includes: a buff table on which a processing target object is mounted; a buff head that holds a buff pad for applying a predetermined process to the processing target object; a buff arm that supports and swings the buff head; a dresser for dressing the buff pad; and a cleaning mechanism that is disposed between the buff table and the dresser and is for cleaning the buff pad.