The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 15, 2023
Filed:
Sep. 16, 2019
Applicant:
Taiwan Semiconductor Manufacturing Co., Ltd., Hsinchu, TW;
Inventors:
Ching-Nen Peng, Hsinchu, TW;
Hsien-Tang Wang, Hsinchu, TW;
Mill-Jer Wang, Hsinchu, TW;
Chi-Chang Lai, Taichung, TW;
Assignee:
Taiwan Semiconductor Manufacturing Co., Ltd., Hsinchu, TW;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01R 1/18 (2006.01); G01R 31/28 (2006.01); H01L 21/66 (2006.01); H01L 23/552 (2006.01);
U.S. Cl.
CPC ...
G01R 1/18 (2013.01); G01R 31/2887 (2013.01); H01L 22/12 (2013.01); H01L 23/552 (2013.01);
Abstract
A circuit probe includes a shielding probe having a base and a conductive probe ring on the base. A shielding cage is attached to the conductive probe ring and has an interior. The shielding cage is configured to be positioned to contain in the interior of the shielding cage at least one integrated circuit formed on a wafer, and to provide electromagnetic shielding of the at least one integrated circuit during testing of the at least one integrated circuit.