The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 08, 2023

Filed:

Jul. 06, 2020
Applicant:

Tongji University, Shanghai, CN;

Inventors:

Qian Cheng, Shanghai, CN;

Weiya Xie, Shanghai, CN;

Ya Gao, Shanghai, CN;

Yiming Chen, Shanghai, CN;

Yingna Chen, Shanghai, CN;

Mengjiao Zhang, Shanghai, CN;

Haonan Zhang, Shanghai, CN;

Shiying Wu, Shanghai, CN;

Assignee:

TONGJI UNIVERSITY, Shanghai, CN;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01R 31/02 (2006.01); G01R 31/26 (2020.01); G01N 21/17 (2006.01); G01R 31/40 (2020.01); G01R 31/42 (2006.01); G01R 31/317 (2006.01); H02S 50/10 (2014.01); H02S 50/00 (2014.01); H02S 99/00 (2014.01);
U.S. Cl.
CPC ...
G01R 31/2642 (2013.01); G01N 21/1717 (2013.01); G01R 31/31721 (2013.01); G01R 31/40 (2013.01); G01R 31/42 (2013.01); G01N 2021/1719 (2013.01); H02S 50/00 (2013.01); H02S 50/10 (2014.12); H02S 99/00 (2013.01);
Abstract

A method for testing a lifetime of a surface state carrier of a semiconductor, including the following steps, 1) a narrow pulse light source is used to emit a light pulse, and coupled to an interior of a near-field optical probe, and the near-field optical probe produces a photon-generated carrier on a surface of a semiconductor material under test through excitation. 2) The excited photon-generated carrier is concentrated on the surface of the semiconductor material, and recombination is conducted continuously with a surface state as a recombination center. 3) A change in a lattice constant is produced due to an electronic volume effect, a stress wave is produced, and a signal of the stress wave is detected in a high-frequency broadband ultrasonic testing mode. 4) Fitting calculation is conducted on the signal of the stress wave to obtain the lifetime of the surface state carrier τ.


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