The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 01, 2023
Filed:
May. 25, 2021
Applicant:
Bruker Nano, Inc., Santa Barbara, CA (US);
Inventors:
Jason Osborne, Lompoc, CA (US);
Sean Hand, Santa Barbara, CA (US);
Vladimir Fonoberov, Santa Barbara, CA (US);
James Young, Santa Barbara, CA (US);
Assignee:
Bruker Nano, Inc., Santa Barbara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01Q 30/06 (2010.01); G01Q 60/38 (2010.01); G01Q 10/04 (2010.01); B82Y 35/00 (2011.01); G01Q 20/04 (2010.01); G01Q 60/34 (2010.01);
U.S. Cl.
CPC ...
G01Q 30/06 (2013.01); B82Y 35/00 (2013.01); G01Q 10/045 (2013.01); G01Q 20/04 (2013.01); G01Q 60/34 (2013.01); G01Q 60/38 (2013.01);
Abstract
An atomic force microscope (AFM) and method of operating the same includes a separate Z height sensor to measure, simultaneously with AFM system control, probe sample distance, pixel-by-pixel during AFM data acquisition. By mapping the AFM data to low resolution data of the Z height data, a high resolution final data image corrected for creep is generated in real time.