The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 18, 2023

Filed:

Jul. 01, 2021
Applicant:

Fei Company, Hillsboro, OR (US);

Assignee:

FEI Company, Hillsboro, OR (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 23/2252 (2018.01); G01N 23/20 (2018.01); G01N 23/203 (2006.01); G01N 23/04 (2018.01); G06N 3/02 (2006.01); G01N 23/083 (2018.01); H01J 37/28 (2006.01);
U.S. Cl.
CPC ...
G01N 23/2252 (2013.01); G01N 23/04 (2013.01); G01N 23/083 (2013.01); G01N 23/203 (2013.01); G01N 23/20083 (2013.01); G06N 3/02 (2013.01); G01N 2223/072 (2013.01); H01J 37/28 (2013.01); H01J 2237/2807 (2013.01);
Abstract

Method and system are disclosed for determining sample composition from spectral data acquired by a charged particle microscopy system. Chemical elements in a sample are identified by processing the spectral data with a trained neural network (NN). If the identified chemical elements not matching with a known elemental composition of the sample, the trained NN is retrained with the spectral data and the known elemental composition of the sample. The retrained NN can then be used to identify chemical elements within other samples.


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