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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 11699603 B1

PDFFull Text
Date of Patent:
Jul. 11, 2023

Filed:

Mar. 09, 2020

Thermal processing system with temperature non-uniformity control

Applicants:

Mattson Technology, Inc., Fremont, CA (US);

Beijing E-town Semiconductor Technology, Co., Ltd, Beijing, CN;

Inventors:

Michael X. Yang, Palo Alto, CA (US);

Chen-an Chen, San Jose, CA (US);

Assignees:

BEIJING E-TOWN SEMICONDUCTOR TECHNOLOGY, CO., LTD, Beijing, CN;

MATTSON TECHNOLOGY, INC., Fremont, CA (US);

Attorney:

Dority & Manning, P.A.

Primary Examiner:

Sang Y Paik

Int. Cl.
CPC ...
H01L 21/677 (2006.01); H01L 21/67 (2006.01); H01L 21/66 (2006.01); H01L 21/268 (2006.01); B23K 26/066 (2014.01); B23K 26/03 (2006.01); G02F 1/157 (2006.01); H05B 3/00 (2006.01); B23K 101/40 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67115 (2013.01); B23K 26/034 (2013.01); B23K 26/066 (2015.10); G02F 1/157 (2013.01); H01L 21/268 (2013.01); H01L 21/67248 (2013.01); H01L 22/26 (2013.01); H05B 3/0047 (2013.01); B23K 2101/40 (2018.08); H05B 2203/032 (2013.01);
Abstract

A thermal processing system is provided. The thermal processing system can include a processing chamber and a workpiece disposed within the processing chamber. The thermal processing system can include a heat source configured to emit light towards the workpiece. The thermal processing system can further include a tunable reflective array disposed between the workpiece and the heat source. The tunable reflective array can include a plurality of pixels. Each pixel of the plurality of pixels can include an electrochromatic material configurable in a translucent state or an opaque state. When the electrochromatic material of a pixel is configured in the translucent state, the light at least partially passes through the pixel. Conversely, transmission of light through a pixel is reduced when the electrochromatic material of the pixel is configured in the opaque state.

Find Patent Forward Citations

Yang, Michael. (2023). Thermal processing system with temperature non-uniformity control (U.S. Patent No. 11699603). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/11699603

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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