The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 13, 2023
Filed:
Jun. 07, 2019
Applied Materials, Inc., Santa Clara, CA (US);
Andrew J. Nagengast, Sunnyvale, CA (US);
Christopher Heung-Gyun Lee, San Jose, CA (US);
Thomas Li, Santa Clara, CA (US);
Anand N. Iyer, Cupertino, CA (US);
Jie Diao, Fremont, CA (US);
Huanbo Zhang, San Jose, CA (US);
Erik S. Rondum, San Ramon, CA (US);
Wei-Cheng Lee, Los Altos Hills, CA (US);
Jeonghoon Oh, Saratoga, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A retaining ring includes a generally annular body having an inner surface to constrain a substrate, an outer surface, and a bottom surface. The bottom surface has a plurality of channels extending from the outer surface to the inner surface and a plurality of islands separated by the channels and providing a contact area to contact a polishing pad. Each channel includes a recessed region adjacent the outer surface such that the channel is deeper in the recessed region than in a remainder of the channel. The recessed region and the remainder of the channel each have substantially uniform depth.