The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 23, 2023

Filed:

Feb. 10, 2022
Applicant:

Applied Materials, Inc., Santa Clara, CA (US);

Inventors:

Yongjing Lin, San Jose, CA (US);

Karla M Bernal Ramos, San Jose, CA (US);

Shih Chung Chen, Cupertino, CA (US);

Yixiong Yang, Fremont, CA (US);

Lin Dong, San Jose, CA (US);

Steven C. H. Hung, Sunnyvale, CA (US);

Srinivas Gandikota, Santa Clara, CA (US);

Assignee:

Applied Materials, Inc., Santa Clara, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/40 (2006.01); H01L 29/51 (2006.01); H01L 29/78 (2006.01); H01L 21/02 (2006.01); H01L 21/28 (2006.01);
U.S. Cl.
CPC ...
H01L 29/408 (2013.01); H01L 21/0228 (2013.01); H01L 21/02153 (2013.01); H01L 21/28158 (2013.01); H01L 29/513 (2013.01); H01L 29/517 (2013.01); H01L 29/7851 (2013.01);
Abstract

Methods of forming and processing semiconductor devices are described. Certain embodiments related to electronic devices which comprise a dipole region having an interlayer dielectric, a high-κ dielectric material, and a dipole layer. The dipole layer comprises one or more of titanium aluminum nitride (TiAlN), titanium tantalum nitride (TiTaN), titanium oxide (TiO), tantalum oxide (TaO), and titanium aluminum carbide (TiAlC).


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