The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 23, 2023
Filed:
Apr. 14, 2020
Asml Holding N.v., Veldhoven, NL;
Asml Netherlands B.v., Veldhoven, NL;
Janardan Nath, Norwalk, CT (US);
Kalyan Kumar Mankala, Bethel, CT (US);
Todd R. Downey, Monroe, CT (US);
Joseph Harry Lyons, Wilton, CT (US);
Ozer Unluhisarcikli, Norwalk, CT (US);
Alexander Harris Ledbetter, Fairfield, CT (US);
Nicholas Stephen Apone, Fairfield, CT (US);
Tian Gang, Best, NL;
ASML HOLDING N.V., Veldhoven, NL;
ASML NETHERLANDS B V, Veldhoven, NL;
Abstract
An illumination adjustment apparatus, to adjust a cross slot illumination of a beam in a lithographic apparatus, includes a plurality of fingers to adjust the cross slot illumination to conform to a selected intensity profile. Each finger has a distal edge that includes at least two segments. The two segments form an indentation of the distal edge.