The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 16, 2023
Filed:
Jul. 22, 2022
Plansee Usa Llc, Greenville, RI (US);
Nam Ngo, Vista, CA (US);
Gerhard Duerrhammer, Vista, CA (US);
Jacob Boyer, Vista, CA (US);
Florian Schaper, Vista, CA (US);
Dustin Hacker, Vista, CA (US);
Mason Payne, Vista, CA (US);
Surf Johnson, Vista, CA (US);
Andrew Dalager, Vista, CA (US);
E/G Electro-Graph, Inc., Vista, CA (US);
Abstract
A cathode holding assembly to be mounted on an arc chamber support of an ion implanter includes a cathode holding plate, an insulator block, and a shield cap. The cathode holding plate has a protruding outer rib towards the shield cap and an opening with a protruding inner rib. A protrusion of the insulator block passes through the opening of the cathode holding plate. The insulator block abuts the protruding inner rib of the opening of the cathode holding plate at an edge of the insulator block to precisely fit the insulator block into the opening of the cathode holding plate. The shield cap is arranged to a side of the insulator block opposing the protrusion. A gap extends between the cathode holding plate and the shield cap, then between the cathode holding plate and the insulator block where it ends.