The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 25, 2023
Filed:
Oct. 03, 2018
Tokyo Electron Limited, Tokyo, JP;
Hiroyuki Masutomi, Koshi, JP;
Takashi Ikeda, Koshi, JP;
TOKYO ELECTRON LIMITED, Tokyo, JP;
Abstract
A substrate liquid processing apparatus includes an inner tubA having a top opening and storing a processing liquid therein; an outer tubB provided outside the inner tub; a first cover bodyconfigured to move between a closing position where a first region of the top opening is closed and an opening position where the first region is opened; and a second cover bodyconfigured to move between a closing position where a second region of the top opening is closed and an opening position where the second region is opened. The first cover body has a bottom wallR and a sidewallR extended upwards therefrom, and the second cover body has a bottom wallR and a sidewallR extended upwards therefrom. Further, when being placed at the closing positions, the sidewalls closely face each other with a gap G having a height H.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile