The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 11, 2023
Filed:
May. 18, 2021
Applicant:
Asm Ip Holding B.v., Almere, NL;
Inventors:
Tiina McKee, Espoo, FI;
Timo Hatanpää, Espoo, FI;
Mikko Ritala, Espoo, FI;
Markku Leskela, Espoo, FI;
Assignee:
ASM IP HOLDING B.V., Almere, NL;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/30 (2006.01); H01L 21/02 (2006.01); C23C 16/455 (2006.01); C01G 39/06 (2006.01); G01N 30/72 (2006.01);
U.S. Cl.
CPC ...
C23C 16/305 (2013.01); C23C 16/45553 (2013.01); H01L 21/0262 (2013.01); H01L 21/02568 (2013.01); C01G 39/06 (2013.01); C01P 2004/03 (2013.01); G01N 30/72 (2013.01);
Abstract
Processes for forming Mo and W containing thin films, such as MoS, WS, MoSe, and WSethin films are provided. Methods are also provided for synthesizing Mo or W beta-diketonate precursors. Additionally, methods are provided for forming 2D materials containing Mo or W.