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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 11569129 B1

PDFFull Text
Date of Patent:
Jan. 31, 2023

Filed:

Jul. 01, 2020

Workpiece processing method

Applicant:

Disco Corporation, Tokyo, JP;

Inventors:

Jinyan Zhao, Tokyo, JP;

Yoshiaki Yodo, Tokyo, JP;

Assignee:

DISCO CORPORATION, Tokyo, JP;

Attorney:

Greer Burns & Crain, Ltd.

Primary Examiner:

Brian Turner

Int. Cl.
CPC ...
B23K 26/38 (2014.01); H01L 21/301 (2006.01); H01L 21/78 (2006.01); B23K 26/53 (2014.01); B23K 26/57 (2014.01); H01L 21/268 (2006.01); H01L 21/683 (2006.01); B23K 26/18 (2006.01); B23K 103/00 (2006.01);
U.S. Cl.
CPC ...
H01L 21/78 (2013.01); B23K 26/18 (2013.01); B23K 26/53 (2015.10); B23K 26/57 (2015.10); H01L 21/268 (2013.01); H01L 21/6836 (2013.01); B23K 2103/56 (2018.08);
Abstract

A workpiece processing method includes holding a workpiece unit on a holding table and forming a division start point. The workpiece unit has a workpiece having a front side and a back side, and an additional member formed on the back side of the workpiece. The additional member is different in material from the workpiece. The workpiece unit is held on the holding table with the additional member opposed to the holding table. The division start point is formed by applying a laser beam to the front side of the workpiece with the focal point of the laser beam set inside the workpiece. The laser beam forms a modified layer inside the workpiece and simultaneously forming a division start point inside the additional member due to the leakage of the laser beam from the focal point toward the back side of the workpiece.

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