The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 24, 2023

Filed:

Dec. 27, 2019
Applicant:

Innoscience (Zhuhai) Technology Co., Ltd., Zhuhai, CN;

Inventors:

Ming-Hong Chang, Zhuhai, CN;

Kingyuen Wong, Zhuhai, CN;

Han-Chin Chiu, Zhuhai, CN;

Hang Liao, Zhuhai, CN;

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/778 (2006.01); H01L 29/66 (2006.01); H01L 29/423 (2006.01); H01L 21/285 (2006.01); H01L 21/3213 (2006.01); H01L 29/20 (2006.01); H01L 29/205 (2006.01);
U.S. Cl.
CPC ...
H01L 29/42316 (2013.01); H01L 29/66462 (2013.01); H01L 29/7787 (2013.01); H01L 21/28581 (2013.01); H01L 21/28587 (2013.01); H01L 21/32136 (2013.01); H01L 21/32139 (2013.01); H01L 29/2003 (2013.01); H01L 29/205 (2013.01);
Abstract

The present disclosure relates to a high electron mobility transistor (HEMT) and a fabrication method thereof. The HEMT may include a substrate; a channel layer disposed on the substrate; a barrier layer disposed on the channel layer; a semiconductor gate disposed on the barrier layer; a metal gate disposed on the semiconductor gate, the metal gate having a trapezoidal cross-sectional shape; and a passivation layer directly contacting the metal gate. A first surface of the metal gate contacts a first surface of the semiconductor gate, and an edge of the first surface of the metal gate is located inside an edge of the first surface of the semiconductor gate.


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