The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 10, 2023
Filed:
Mar. 26, 2020
United Microelectronics Corp., Hsin-Chu, TW;
Ming-Che Lai, Hsinchu, TW;
Hua-Wei Peng, Hsinchu County, TW;
Chia-He Cheng, Taichung, TW;
Ming-Tso Chen, Hsinchu County, TW;
Chao-Chi Lu, Hsinchu County, TW;
Hsin-Hsu Lin, Miaoli County, TW;
Kuo-Tsai Lo, New Taipei, TW;
Kao-Hua Wu, Hsinchu County, TW;
Huan-Hsin Yeh, Hsinchu County, TW;
UNITED MICROELECTRONICS CORP., Hsin-Chu, TW;
Abstract
A substrate processing apparatus includes a process station for processing a substrate; a cassette station integrated with the process station; a substrate carriage equipped for transferring the substrate between said process station and the cassette station through a passage located at an interface between the process station and said cassette station; and a substrate scanner equipped at said interface between the process station and the cassette station for capturing surface image data during transportation of the substrate that passes through the passage.