The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 13, 2022
Filed:
Jun. 02, 2020
Applicant:
Ebara Corporation, Tokyo, JP;
Inventors:
Assignee:
EBARA CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B08B 13/00 (2006.01); B08B 1/00 (2006.01); H01L 21/67 (2006.01); B08B 3/04 (2006.01);
U.S. Cl.
CPC ...
B08B 13/00 (2013.01); B08B 1/002 (2013.01); B08B 3/04 (2013.01); H01L 21/67028 (2013.01);
Abstract
The disclosure provides a jig for attaching and detaching a cleaning member, which facilitates attaching and detaching the cleaning member to and from a rotation device without holding the cleaning member directly by hand, even when there is no sufficient spacing around the cleaning member. The jigfor attaching and detaching a cleaning memberincludes a pair of jig bodiescapable of clamping two endsof a holderof the cleaning member, and a connecting mechanismthat interlocks the movements of the pair of jig bodiesbetween a clamped state in which two endsof the holderare clamped and a non-clamped state in which the clamped state is released.