The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 06, 2022
Filed:
Jul. 01, 2019
Applicant:
Tokyo Electron Limited, Tokyo, JP;
Inventors:
Kyoko Ikeda, Yamanashi, JP;
Kazuya Dobashi, Tokyo, JP;
Assignee:
TOKYO ELECTRON LIMITED, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B08B 7/02 (2006.01); B08B 5/02 (2006.01); B08B 13/00 (2006.01); C23C 16/44 (2006.01);
U.S. Cl.
CPC ...
B08B 7/026 (2013.01); B08B 5/023 (2013.01); B08B 13/00 (2013.01); C23C 16/4407 (2013.01);
Abstract
A cleaning method that removes contaminants adhering to a stage in a chamber, includes: setting a pressure in a chamber to a predetermined vacuum pressure; supplying a first gas that forms a shock wave toward the stage; and supplying a second gas that does not form the shock wave toward the stage.