The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 29, 2022

Filed:

Feb. 08, 2019
Applicant:

Intel Corporation, Santa Clara, CA (US);

Inventors:

Said Rami, Portland, OR (US);

Hyung-Jin Lee, Portland, OR (US);

Saurabh Morarka, Hillsboro, OR (US);

Guannan Liu, Portland, OR (US);

Qiang Yu, San Jose, CA (US);

Bernhard Sell, Portland, OR (US);

Mark Armstrong, Portland, OR (US);

Assignee:

Intel Corporation, Santa Clara, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/78 (2006.01); H01L 29/51 (2006.01); H01L 29/49 (2006.01); H01L 29/423 (2006.01); H01L 29/06 (2006.01); H01L 29/66 (2006.01); H01L 29/40 (2006.01); H01L 29/08 (2006.01); H01L 21/265 (2006.01); H01L 29/165 (2006.01);
U.S. Cl.
CPC ...
H01L 29/7856 (2013.01); H01L 29/0673 (2013.01); H01L 29/0847 (2013.01); H01L 29/401 (2013.01); H01L 29/42368 (2013.01); H01L 29/42392 (2013.01); H01L 29/4983 (2013.01); H01L 29/512 (2013.01); H01L 29/66795 (2013.01); H01L 21/26513 (2013.01); H01L 29/0649 (2013.01); H01L 29/165 (2013.01); H01L 29/42376 (2013.01); H01L 29/66636 (2013.01);
Abstract

Disclosed herein are field-effect transistors with asymmetric gate stacks. An example transistor includes a channel material and an asymmetric gate stack, provided over a portion of the channel material between source and drain (S/D) regions. The gate stack is asymmetric in that a thickness of a gate dielectric of a portion of the gate stack closer to one of the S/D regions is different from that of a portion of the gate stack closer to the other S/D region, and in that a work function (WF) material of a portion of the gate stack closer to one of the S/D regions is different from a WF material of a portion of the gate stack closer to the other S/D region. Transistors as described herein exploit asymmetry in the gate stacks to improve the transistor performance in terms of high breakdown voltage, high gain, and/or high output resistance.


Find Patent Forward Citations

Loading…