The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 01, 2022
Filed:
Mar. 30, 2018
Applicant:
Hitachi Chemical Dupont Microsystems, Ltd., Tokyo, JP;
Inventors:
Etsuharu Tsuchiya, Tokyo, JP;
Tetsuya Enomoto, Hitachi, JP;
Takashi Kawamori, Tokyo, JP;
Nobuyuki Saito, Hitachi, JP;
Yukari Koibuchi, Hitachi, JP;
Atsutaro Yoshizawa, Hitachi, JP;
Akira Asada, Hitachi, JP;
Assignee:
HD MicroSystems, Ltd., Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/027 (2006.01); G03F 7/037 (2006.01); G03F 7/40 (2006.01); C08G 73/10 (2006.01); G03F 7/028 (2006.01); G03F 7/038 (2006.01); G03F 7/20 (2006.01);
U.S. Cl.
CPC ...
G03F 7/037 (2013.01); C08G 73/10 (2013.01); G03F 7/028 (2013.01); G03F 7/0382 (2013.01); G03F 7/2004 (2013.01);
Abstract
A photosensitive resin composition comprising (A) a polyimide precursor having a polymerizable unsaturated bond; (B) a polymerizable monomer having an aliphatic cyclic skeleton; (C) a photopolymerization initiator; and (D) a solvent.