The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 06, 2022
Filed:
Dec. 07, 2018
Tokyo Electron Limited, Tokyo, JP;
Ryouichirou Naitou, Koshi, JP;
Masato Hayashi, Koshi, JP;
Hideo Shite, Koshi, JP;
Hiroyuki Ide, Koshi, JP;
Yosuke Kameda, Koshi, JP;
Seiya Totsuka, Koshi, JP;
Atsumu Maita, Koshi, JP;
Takami Satoh, Koshi, JP;
Hirofumi Araki, Koshi, JP;
Kentaro Yoshihara, Koshi, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
A solution supply apparatus is for supplying a treatment solution to a treatment solution discharger which discharges the treatment solution to a treatment object. The solution supply apparatus includes: a supply pipe line connected to the treatment solution discharger; a filter provided on the supply pipe line which filters the treatment solution to remove foreign substances; and a controller. The controller performs a determination of a state of the treatment solution to be supplied to a primary side of the filter and, when the state of the treatment solution is determined to be bad, outputs a control signal for restricting supply of the treatment solution to the primary side of the filter.