The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 30, 2022
Filed:
Jul. 17, 2019
Asml Netherlands B.v., AH Veldhoven, NL;
Jeroen Gerard Gosen, Westport, CT (US);
Te-Yu Chen, San Jose, CA (US);
Dennis Herman Caspar Van Banning, Best, NL;
Edwin Cornelis Kadijk, Eindhoven, NL;
Martijn Petrus Christianus Van Heumen, Santa Clara, CA (US);
Erheng Wang, San Jose, CA (US);
Johannes Andreas Henricus Maria Jacobs, Veldhoven, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
An improved particle beam inspection apparatus, and more particularly, a particle beam inspection apparatus including an improved load lock unit is disclosed. An improved load lock system may comprise a plurality of supporting structures configured to support a wafer and a conditioning plate including a heat transfer element configured to adjust a temperature of the wafer. The load lock system may further comprise a gas vent configured to provide a gas between the conditioning plate and the wafer and a controller configured to assist with the control of the heat transfer element.