The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 23, 2022

Filed:

Sep. 26, 2017
Applicant:

Intel Corporation, Santa Clara, CA (US);

Inventors:

Sean T. Ma, Portland, OR (US);

Willy Rachmady, Beaverton, OR (US);

Gilbert Dewey, Hillsboro, OR (US);

Cheng-Ying Huang, Hillsboro, OR (US);

Dipanjan Basu, Hillsboro, OR (US);

Assignee:

Intel Corporation, Santa Clara, CA (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 29/423 (2006.01); H01L 29/06 (2006.01); H01L 29/20 (2006.01); H01L 29/40 (2006.01); H01L 29/66 (2006.01); H01L 29/775 (2006.01); H01L 29/78 (2006.01);
U.S. Cl.
CPC ...
H01L 29/42376 (2013.01); H01L 29/0673 (2013.01); H01L 29/20 (2013.01); H01L 29/401 (2013.01); H01L 29/66469 (2013.01); H01L 29/66795 (2013.01); H01L 29/775 (2013.01); H01L 29/7851 (2013.01);
Abstract

Group III-V semiconductor devices having dual workfunction gate electrodes and their methods of fabrication are described. In an example, an integrated circuit structure includes a gallium arsenide layer on a substrate. A channel structure is on the gallium arsenide layer. The channel structure includes indium, gallium and arsenic. A source structure is at a first end of the channel structure and a drain structure is at a second end of the channel structure. A gate structure is over the channel structure, the gate structure having a first workfunction material laterally adjacent a second workfunction material. The second workfunction material has a different workfunction than the first workfunction material.


Find Patent Forward Citations

Loading…