The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 23, 2022
Filed:
Jun. 19, 2018
Infineon Technologies Ag, Neubiberg, DE;
Michael Rogalli, Rottenburg, DE;
Johann Gatterbauer, Parsberg, DE;
Wolfgang Lehnert, Lintach, DE;
Kurt Matoy, Strau, AT;
Evelyn Napetschnig, Diex, AT;
Manfred Schneegans, Vaterstetten, DE;
Bernhard Weidgans, Bernhardswald, DE;
Infineon Technologies AG, Neubiberg, DE;
Abstract
A method of forming an aluminum oxide layer is provided. The method includes providing a metal surface including at least one metal of a group of metals, the group of metals consisting of copper, aluminum, palladium, nickel, silver, and alloys thereof. The method further includes depositing an aluminum oxide layer on the metal surface by atomic layer deposition, wherein a maximum processing temperature during the depositing is 280° C., such that the aluminum oxide layer is formed with a surface having a liquid solder contact angle of less than 40°.