The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 23, 2022
Filed:
Jul. 08, 2019
Applicant:
Tokyo Electron Limited, Tokyo, JP;
Inventors:
Daisuke Hayashi, Miyagi, JP;
Shinya Ishikawa, Miyagi, JP;
Assignee:
Tokyo Electron Limited, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/458 (2006.01); C23C 14/50 (2006.01); C23C 16/46 (2006.01); H01J 37/32 (2006.01); C23C 16/455 (2006.01); H01L 21/3065 (2006.01); C23C 16/509 (2006.01);
U.S. Cl.
CPC ...
C23C 16/4586 (2013.01); C23C 14/50 (2013.01); C23C 16/458 (2013.01); C23C 16/45587 (2013.01); C23C 16/46 (2013.01); C23C 16/463 (2013.01); C23C 16/5096 (2013.01); H01J 37/32715 (2013.01); H01L 21/3065 (2013.01);
Abstract
A stage for mounting a workpiece and an edge ring is provided, the stage including a first flow path and a second flow path along each of which a fluid flows, within the stage; a bifurcation at which an inlet port of the first flow path and an inlet port of the second flow path are coupled; a junction at which an outlet port of the first flow path and an outlet port of the second flow path are coupled; and a member provided at least one of the bifurcation and the junction, the member having at least one opening that communicates with the first flow path and the second flow path.