The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 05, 2022
Filed:
Sep. 17, 2020
Asml Netherlands B.v., Veldhoven, NL;
Davit Harutyunyan, Kranenburg, DE;
Fei Jia, Eindhoven, NL;
Frank Staals, Eindhoven, NL;
Fuming Wang, Eindhoven, NL;
Hugo Thomas Looijestijn, Eindhoven, NL;
Cornelis Johannes Rijnierse, Eindhoven, NL;
Maxim Pisarenco, Son en Breugel, NL;
Roy Werkman, Eindhoven, NL;
Thomas Theeuwes, Veldhoven, NL;
Tom Van Hemert, Veldhoven, NL;
Vahid Bastani, Eindhoven, NL;
Jochem Sebastiaan Wildenberg, Aarle-Rixtel, NL;
Everhardus Cornelis Mos, Best, NL;
Erik Johannes Maria Wallerbos, Helmond, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A method, system and program for determining a fingerprint of a parameter. The method includes determining a contribution from a device out of a plurality of devices to a fingerprint of a parameter. The method includes obtaining parameter data and usage data, wherein the parameter data is based on measurements for multiple substrates having been processed by the plurality of devices, and the usage data indicates which of the devices out of the plurality of the devices were used in the processing of each substrate; and determining the contribution using the usage data and parameter data.