The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 21, 2022
Filed:
Jul. 18, 2019
Nova Ltd., Rehovot, IL;
Gilad Barak, Rehovot, IL;
Michael Chemama, Rehovot, IL;
Smadar Ferber, Rehovot, IL;
Yanir Hainick, Rehovot, IL;
Boris Levant, Rehovot, IL;
Ze'Ev Lindenfeld, Rehovot, IL;
Dror Shafir, Rehovot, IL;
Yuri Shirman, Rehovot, IL;
Elad Schleifer, Rehovot, IL;
NOVA LTD, Rehovot, IL;
Abstract
Semiconductor device metrology including creating a time-domain representation of wavelength-domain measurement data of light reflected by a patterned structure of a semiconductor device, selecting an earlier-in-time portion of the time-domain representation that excludes a later-in-time portion of the time-domain representation, and determining one or more measurements of one or more parameters of interest of the patterned structure by performing model-based processing using the earlier-in-time portion of the time-domain representation.