The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 14, 2022

Filed:

Jul. 20, 2020
Applicants:

Taiwan Semiconductor Manufacturing Co., Ltd., Hsinchu, TW;

Tsmc China Company Limited, Shanghai, CN;

Inventor:

Zheng-Long Chen, New Taipei, TW;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 29/66 (2006.01); H01L 21/762 (2006.01); H01L 29/06 (2006.01); H01L 29/08 (2006.01); H01L 29/78 (2006.01);
U.S. Cl.
CPC ...
H01L 29/66681 (2013.01); H01L 21/76205 (2013.01); H01L 29/063 (2013.01); H01L 29/0865 (2013.01); H01L 29/0878 (2013.01); H01L 29/0882 (2013.01); H01L 29/7816 (2013.01);
Abstract

A method of forming a semiconductor structure including: forming a drift well in a substrate, in which the drift well includes first dopants having a first conductivity type; forming an isolation structure over the drift well; forming a well region in the drift well and spaced apart from the isolation structure, such that a top portion of the drift well is between the well region and the isolation structure; doping the top portion with second dopants having a second conductivity type different from the first conductivity type, such that a doping concentration of the second dopants in the top portion is lower than a doping concentration of the first dopants in the top portion after doping the top portion; and forming a gate structure extending from the isolation structure to the well region and covering the top portion of the drift well.


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