The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 19, 2022

Filed:

Apr. 29, 2019
Applicant:

Taiwan Semiconductor Manufacturing Co., Ltd., Hsinchu, TW;

Inventors:

Wei-Barn Chen, Tainan, TW;

Ting-Huang Kuo, Tainan, TW;

Shiu-Ko Jangjian, Tainan, TW;

Chi-Cherng Jeng, Tainan, TW;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/78 (2006.01); H01L 21/762 (2006.01); H01L 21/8234 (2006.01); H01L 49/02 (2006.01); H01L 29/66 (2006.01); H01L 27/06 (2006.01); H01L 27/088 (2006.01);
U.S. Cl.
CPC ...
H01L 29/7851 (2013.01); H01L 21/76229 (2013.01); H01L 21/823412 (2013.01); H01L 21/823431 (2013.01); H01L 21/823481 (2013.01); H01L 27/0629 (2013.01); H01L 27/0886 (2013.01); H01L 28/40 (2013.01); H01L 29/66795 (2013.01); H01L 29/7853 (2013.01);
Abstract

A FinFET device structure and method for forming the same are provided. The FinFET device structure includes a first fin structure over a substrate, and a second fin structure over the substrate. The FinFET device structure also includes a first isolation structure over the substrate and surrounding the first fin structure. The first fin structure is protruded from a top surface of the first isolation structure. The FinFET device structure further includes a second isolation structure over the substrate and surrounding the second fin structure. The second fin structure is protruded from a top surface of the second isolation structure, and the first fin structure has a vertical sidewall surface and the second fin structure has a sloped sidewall surface.


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