The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 05, 2022

Filed:

Nov. 27, 2018
Applicant:

International Business Machines Corporation, Armonk, NY (US);

Inventors:

Gangadhara Raja Muthinti, Albany, NY (US);

Matthew Sendelbach, Albany, NY (US);

Roy Koret, Albany, NY (US);

Aron Cepler, Albany, NY (US);

Wei Ti Lee, Albany, NY (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/67 (2006.01); G01B 15/02 (2006.01); G01B 11/06 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67253 (2013.01); G01B 11/06 (2013.01); G01B 15/02 (2013.01); G01B 2210/56 (2013.01);
Abstract

A computer-implemented method for measuring a parameter of a semiconductor. A non-limiting example of the computer-implemented method includes receiving, using a processor, a raw signal from a first tool representing a measured parameter of a semiconductor device. The method also receives, using the processor, data on the measured parameter from a second tool, and calculates, using the processor, the measured parameter based on the data received from the second tool and on a constraint based on the raw signal from the first tool.


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