The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 29, 2022
Filed:
Jun. 29, 2017
Applicant:
Asml Netherlands B.v., Veldhoven, NL;
Inventors:
Maarten Jozef Jansen, Casteren, NL;
Engelbertus Antonius Fransiscus Van Der Pasch, Oirschot, NL;
Suzanne Johanna Antonetta Geertruda Cosijns, Casteren, NL;
Assignee:
ASML Netherlands B.V., Veldhoven, NL;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01B 9/02 (2006.01); G01B 9/02056 (2022.01); G01B 9/02001 (2022.01); G03F 7/20 (2006.01); G01B 9/02055 (2022.01); G01B 9/02003 (2022.01);
U.S. Cl.
CPC ...
G01B 9/02059 (2013.01); G01B 9/02003 (2013.01); G01B 9/02007 (2013.01); G01B 9/02072 (2013.04); G03F 7/70775 (2013.01);
Abstract
An interferometer system, including a heterodyne interferometer and a processing system. The heterodyne interferometer is arranged to provide a reference signal and a measurement signal. The reference signal has a reference phase. The measurement signal has a measurement phase and an amplitude. The processing system is arranged to determine a cyclic error of the heterodyne interferometer based on the reference phase, the measurement phase and the amplitude.