The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 01, 2022
Filed:
May. 18, 2020
Applied Materials Israel Ltd., Rehovot, IL;
Konstantin Chirko, Rehovot, IL;
Itamar Shani, Rehovot, IL;
Albert Karabekov, Ashdod, IL;
Guy Eytan, Kidron, IL;
Lior Yaron, Nes Ziona, IL;
Alon Litman, Nes-Ziona, IL;
APPLIED MATERIALS ISRAEL LTD., Rehovot, IL;
Abstract
A method, a non-transitory computer readable medium and a three-dimensional evaluation system for providing three dimensional information regarding structural elements of a specimen. The method can include illuminating the structural elements with electron beams of different incidence angles, where the electron beams pass through the structural elements and the structural elements are of nanometric dimensions; detecting forward scattered electrons that are scattered from the structural elements to provide detected forward scattered electrons; and generating the three dimensional information regarding structural elements based at least on the detected forward scattered electrons.