The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 01, 2022
Filed:
Mar. 31, 2016
Rohm and Haas Electronic Materials Korea Ltd., Ghungcheongnam-Do, KR;
Jae Hwan Sim, Gyeonggi-do, KR;
Hye-Won Lee, Gyeonggi-do, KR;
Eunhye Cho, Gyeonggi-do, KR;
Jung Kyu Jo, Gyeonggi-do, KR;
Jin Hong Park, Gyeonggi-do, KR;
Eui Hyun Ryu, Gyeonggi-do, KR;
Jae-Bong Lim, Chungnam, KR;
Rohm and Haas Electronic Materials Korea Ltd., Chungcheongnam-do, KR;
Abstract
Organic coating compositions, particularly antireflective coating compositions for use with an overcoated photoresist, are provided that comprise that a blend of two or more resins, where one resin has epoxy groups either pendant or fused to the polymer backbone. Preferred coating compositions include: 1) a first resin that comprises one or more epoxy reactive groups; and 2) a crosslinker resin that is distinct from the first resin and comprises epoxy groups.