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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 11251063 B1

PDFFull Text
Date of Patent:
Feb. 15, 2022

Filed:

Oct. 07, 2020

Article transporter in semiconductor fabrication

Applicant:

Taiwan Semiconductor Manufacturing Company, Ltd., Hsinchu, TW;

Inventors:

Jheng-Si Su, Zhubei, TW;

Yu-Chen Wei, New Taipei, TW;

Chih-Yuan Yang, Hsinchu, TW;

Shih-Ho Lin, Jhubei, TW;

Jen-Chieh Lai, Tainan, TW;

Assignee:

Taiwan Semiconductor Manufacturing Company, Ltd., Hsinchu, TW;

Attorney:

Birch, Stewart, Kolasch & Birch, LLP

Primary Examiner:

Gerald McClain

Int. Cl.
CPC ...
H01L 21/677 (2006.01); H01L 21/683 (2006.01); H01L 21/687 (2006.01); B25J 15/06 (2006.01); B65G 61/00 (2006.01); B24B 37/20 (2012.01); H01L 21/67 (2006.01); B25J 11/00 (2006.01);
U.S. Cl.
CPC ...
H01L 21/6838 (2013.01); B24B 37/20 (2013.01); B25J 11/0095 (2013.01); B25J 15/0616 (2013.01); B65G 61/00 (2013.01); H01L 21/67225 (2013.01); H01L 21/67259 (2013.01); H01L 21/67706 (2013.01); H01L 21/67718 (2013.01); H01L 21/67736 (2013.01); H01L 21/67742 (2013.01); H01L 21/67766 (2013.01); H01L 21/67778 (2013.01); H01L 21/68707 (2013.01); Y10S 901/40 (2013.01);
Abstract

A transporter for transporting an article used in semiconductor fabrication is provided. The transporter includes a robotic arm. The transporter further includes two platens connected to the robotic arm. Each of the two platens an inner surface facing the other, and a number of gas holes are formed on each of the inner surfaces of the two platens. The transporter also includes a gas supplier placed in communication with the gas holes. The gas supplier is used to control the flow of gas through the gas holes.

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