The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 25, 2022

Filed:

Apr. 16, 2020
Applicants:

Taiwan Semiconductor Manufacturing Co., Ltd., Hsinchu, TW;

National Taiwan University, Taipei, TW;

Inventors:

Chung-En Tsai, Hsinchu County, TW;

Chia-Che Chung, Hsinchu, TW;

Chee-Wee Liu, Taipei, TW;

Fang-Liang Lu, New Taipei, TW;

Yu-Shiang Huang, New Taipei, TW;

Hung-Yu Yeh, Taichung, TW;

Chien-Te Tu, Taipei, TW;

Yi-Chun Liu, Taichung, TW;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/06 (2006.01); H01L 29/66 (2006.01); H01L 21/306 (2006.01); H01L 29/78 (2006.01); H01L 29/08 (2006.01); H01L 21/02 (2006.01); H01L 29/423 (2006.01); H01L 29/10 (2006.01);
U.S. Cl.
CPC ...
H01L 29/0673 (2013.01); H01L 21/0262 (2013.01); H01L 21/02433 (2013.01); H01L 21/02532 (2013.01); H01L 21/02535 (2013.01); H01L 21/02609 (2013.01); H01L 21/30604 (2013.01); H01L 29/0847 (2013.01); H01L 29/1037 (2013.01); H01L 29/42392 (2013.01); H01L 29/66545 (2013.01); H01L 29/66795 (2013.01); H01L 29/785 (2013.01); H01L 29/7848 (2013.01);
Abstract

The present disclosure generally relates to a gate-all-around (GAA) transistor. The GAA transistor may include regrown source/drain layers in source/drain stressors. Atomic ratio differences among the regrown source/drain layers are tuned to reduce strain mismatch among the semiconductor nanosheets. Alternatively, the GAA transistor may include strained channels formed using a layer stack of alternating semiconductor layers having different lattice constants.


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